Fast and precise for demanding manufacturing processesTemperature control

Thermoelectric temperature control system LAUDASemistatProvide stable and reproducible temperature control for plasma etching process. Dynamically control the electrostatic chuck system(ESC)The temperature can be used in any etching process.LAUDA SemistatThe basis of the design of thermoelectric temperature control system is temperature conversion based on the Peltier principle, and these components can achieve fast and accurate conversionThe temperature control meets the increasingly small size requirements of electronic component production today.

Compared to compressor based systems, using Semistat temperature control system online reduces energy consumption by up to 90%. Can be installed underground at the location of use, saving space and minimizing the use of clean rooms. Quickly and accurately control the process temperature curve within ± 0.1 K to improve inter wafer homogeneity.

Important functions:

• Low energy consumption, system without compressor and refrigerant
• Small footprint, if placed under the floor, it does not occupy Sub Fab space
• Extremely low filling amount of thermal conductive liquid

Technical parameters: